Base on phase-shifting technique, the laser interferometer, widely used in the high-precision measurement of planar and spherical optical components, characterizes the three-dimensional topography of the measured surface with a precision of 0.06 μm (Peak-to-valley) or higher.
1. Precisely measure the transmitted and reflected wavefronts of optical components with diameters up to 4 inches.
2. The measurement precision and repeatability are comparable to American Zygo and 4D interferometers.
3. Customized instruments can be developed according to customer requirements.