
4-inch Laser Interferometer
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4-inch Laser Interferometer
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- Commodity name: 4-inch Laser Interferometer
Base on phase-shifting technique, the laser interferometer, widely used in the high-precision measurement of planar and spherical optical components, characterizes the three-dimensional topography of the measured surface with a precision of 0.06 μm (Peak-to-valley) or higher.
Base on phase-shifting technique, the laser interferometer, widely used in the high-precision measurement of planar and spherical optical components, characterizes the three-dimensional topography of the measured surface with a precision of 0.06 μm (Peak-to-valley) or higher.
1. Precisely measure the transmitted and reflected wavefronts of optical components with diameters up to 4 inches.
2. The measurement precision and repeatability are comparable to American Zygo and 4D interferometers.
3. Customized instruments can be developed according to customer requirements. -
1. Precisely measure the transmitted and reflected wavefronts of optical components with diameters up to 4 inches.
2. The measurement precision and repeatability are comparable to American Zygo and 4D interferometers.
3. Customized instruments can be developed according to customer requirements. -
Projection Parameters Principle of Measurement Fizeau Interference Method of Phase-Shifting Wavelength Phase-Shifting or Mechanical Phase-Shifting Test Wavelength 632.8 nm (Customizable) Resolution of Camera 2048*2048 Aperture of Measurement (4-inch)101.6mm Focusing Ability of Camera ✔ Acquisition Frequency of Camera 50Hz Wavefront PV error of the transmission
flat (TF)λ/10 Wavefront PV error of the reference flat
(RF)≦λ/10(Customizableλ/20) Cavity Error (PV) ≦λ/10, λ=632.8nm RMS Stability (24 hours) ≦1nm (2δ) Measurement of High-Parallelism Optical
Elements✔ Standard Fittings Computer, Real-time Aligning Video, Measurement and Analysis Software Coherent length 1.0m(The parameter is square with the interferometer aperture) Working Temperature Requirements 22℃±1℃ Working Temperature Fluctuation
Requirements< 1°C / hour Working Humidity Requirements 55%±10%R. H. Isolation Requirements Air-floating Platform: 1 - 2 Hz (Natural Frequency)