Ion Beam Figure Machine Tool is working by high beam density, small beam divergence angle and large beam uniformity High energy ion beam bombards the surface of optics, to achieve ultra-precision surface error. The generation of high-energy ions is based on high purity inert gas, passing through hollow cathode. The electrode generates ionization under the discharge of the power module and injects the electron beam into the cavity, and the electron beam is uniformly distributed into the anode area through the electron uniform plate under the action of the electric field and magnetic field of the anode. the electric field of the grid The output ion beam is controlled by the system to achieve uniform and stable surface removal of optical elements.
1.The ultra-precision Influence Function with constancy better than 98%.
2.The Gauss Influence Function with FWHM form 40mm to 0.1mm for different aperture.
3.The high-gradient optic’s figure with more scope for constant Influence function.