
Multi-wavelength Laser Planar Interferometer
Keywords:
Multi-wavelength Laser Planar Interferometer
Category:
- Details
- Characteristics
- Parameters
- Application
-
- Commodity name: Multi-wavelength Laser Planar Interferometer
Based on the principle of Fizeau interference and mechanical phase shifting and equipped with the self-developed super-achromatic beam expanding and imaging system, the interferometer supports the plug and play of laser source with the working wavelength in the range of 600 - 1600 nm.
Based on the principle of Fizeau interference and mechanical phase shifting and equipped with the self-developed super-achromatic beam expanding and imaging system, the interferometer supports the plug and play of laser source with the working wavelength in the range of 600 - 1600 nm.
-
1.When changing laser source with another wavelength, no adjustment is needed.
2.The interferometer can be equipped with self-developed absolute test accessories to obtain the absolute surface error of a surface with an accuracy better than λ/40. -
Technical Parameters Product Series φ300 Phase-Shifting Digital Interferometer φ600 Phase-Shifting Digital Interferometer φ800 Phase-Shifting Digital Interferometer Measurement Method Fizeau Interference Principle Fizeau Interference Principle Fizeau Interference Principle Measurement Aperture 300mm 600mm 800mm Phase shift mode Wavelength phase shift Polarization phase shift or wavelength phase shift Polarization phase shift or wavelength phase shift Host wavelength 632.8nm 660nm or 632.8nm 660nm or 632.8nm Reference mirror shape error of transmission plane
(PV)≤λ/10, λ=632.8nm ≤λ/10, λ=632.8nm ≤λ/10, λ=632.8nm Reference mirror shape error of reflection plane
(PV)≤λ/10, λ=632.8nm ≤λ/10, λ=632.8nm ≤λ/10, λ=632.8nm Cavity accuracy (PV) ≤λ10, λ=632.8nm ≤λ/10, λ=632.8nm ≤λ/10, λ=632.8nm Surface error measurement repeatability ≤1nm (2δ) ≤1nm (2δ) ≤1nm (2δ) Main camera resolution 2048*2048 2048*2048 2048*2048 Main camera focusing capability Yes Yes Yes Measure the transmission and reflection wavefront of high parallel optical components Support Support Support Working temperature requirements 22℃±1℃ 22℃±1℃ 22℃±1℃ Working temperature fluctuation requirements Change less than 1℃ per hour Change less than 1℃ per hour Change less than 1℃ per hour Working humidity requirements 55%±10%RH 55%±10%RH 55%±10%RH Seismic isolation requirements Air floating platform, natural frequency: 1~2Hz Air floating platform, natural frequency: 1~2Hz Air floating platform, natural frequency: 1~2Hz Operating voltage 220V 220V 220V